Keithley - 237 - Other
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Equipment:
237
Date:
1989
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Information
The 236 237 and 238 Source-Measure Units (SMU)
are fully programmable instruments, capable of
sourcing and measuring voltage or current simulta-
neously. These systems are really four instruments
in one Voltage Source Current source voltage mea-
sure and current measure.
QQZQ
QZQQ
QZZQ
The 236 will source voltage from 100μV to 110V, and
current from 100fA to 100mA. It can also measure
voltage from 10μV to 110V and current from 10fA to
100mA. The 237 offers the same capabilities with a
decade enhancement in Voltage Source and mea-
sure (1100V). In this higher voltage range, current
source and measure is 10mA maximum. The 238 offers a decade enhancement in Current source and
measure (1A). In this higher current range, voltage
source and measure is 15V maximum.
The 236 237 and 238 will measure very small cur-
rents and voltages. With current sensitivity of 10fA,
measurement capabilities are equal to those of an
electrometer. Selectable integration and the filtering
of multiple measurements enhances sensitivity for
demanding applications.
Both source voltages and source currents settle to
specified accuracy in as little as 500μs. Programma-
ble delay and fast, integrating measurement capa-
bility can provide coordinated source-measure
times of 1ms.
Applications
These instruments address a wide variety of appli-
cations, including the characterization of semicon-
ductor devices, and the measurement of leakage
currents or resistivity. They are particularly useful as
source and measuring instruments in automated
test equipment (ATE).
The 236 237 and 238 provide simple, accurate mea-
surements in semiconductor applications. Multiple
units controlled with a personal computer make a
powerful semiconductor parameter Analyzer Non-
standard tests are also performed efficiently be-
cause of the unique versatility of these units.
Two accessory semiconductor test fixtures maintain
the signal integrity of the SMUs all the way to your
device. The 8006 is a general purpose test fixture,
and the 8007 is designed to accommodate either 24-
or 48-pin devices. These test fixtures can be safety
interlocked with the 236 237 and 238 to prevent
accidental shock.
A Keithley Model 707A or 708A switching matrix
and semiconductor switching cards may be used in
conjunction with the 236 237 and 238 for opti-
mum performance in automated semiconductor
measurement applications Keithley SMUs are powerful tools for research and
industrial test applications. The short set-up time
and simplified programming are big advantages for
tests that need to be up and running quickly. The
overall versatility is ideal for constantly changing
research use.
The large dynamic range of source and measure
capabilities permits accurate measurement of insu-
lation resistance, leakage current, and dissipation
factors. The high sensitivity of these units make
them ideal for characterizing the electrical proper-
ties of many materials.
8 Manuals
User manual
Manual type:
User manual
Pages:
314
Size:
13.1 MB
Language:
english
Revision:
Fifth Printing
Manual-ID:
236-901-01
Date:
Quality:
Scanned document, all readable.
Upload date:
May 20, 2012
MD5:
32f85e88-0b9c-1484-d13f-e761c86a33e1
Downloads:
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Service manual
Manual type:
Service manual
Pages:
104
Size:
9.3 MB
Language:
english
Revision:
Fourth Printing
Manual-ID:
236-902-01
Date:
Quality:
Scanned document, all readable.
Upload date:
May 20, 2012
MD5:
21061753-fb32-fbb7-7162-b15c729fdf29
Downloads:
3275
User manual
Manual type:
User manual
Pages:
210
Size:
25.1 MB
Language:
english
Revision:
Fourth Printing
Manual-ID:
236-904-01
Date:
Quality:
Scanned document, all readable.
Upload date:
May 20, 2012
MD5:
096e23fb-2065-da31-5294-2e682c624197
Downloads:
3334
Information
Application Manual
Datasheet
Manual type:
Datasheet
Pages:
2
Size:
913.0 KB
Language:
english
Revision:
Manual-ID:
Date:
Quality:
Electronic document, no scan, very well readable.
Upload date:
March 7, 2014
MD5:
cc009c72-023f-cd05-068b-a4392cc81bc4
Downloads:
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Datasheet
Manual type:
Datasheet
Pages:
4
Size:
188.8 KB
Language:
english
Revision:
Manual-ID:
Date:
Quality:
Electronic document, no scan, very well readable.
Upload date:
April 23, 2017
MD5:
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Downloads:
1504
User manual
Manual type:
User manual
Pages:
314
Size:
13.1 MB
Language:
english
Revision:
E
Manual-ID:
236-900-01
Date:
March 2001
Quality:
Scanned document, all readable.
Upload date:
Aug. 22, 2018
MD5:
bad50a5f-2100-731e-028e-762654b77acd
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1955
User manual
Manual type:
User manual
Pages:
89
Size:
1.1 MB
Language:
english
Revision:
A
Manual-ID:
236-905-01
Date:
January 1990
Quality:
Scanned document, all readable.
Upload date:
Aug. 22, 2018
MD5:
a61e319c-3e48-c087-249e-9fb872b0091b
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Information
Quick Reference Guide
User manual
Manual type:
User manual
Pages:
314
Size:
14.7 MB
Language:
english
Revision:
E
Manual-ID:
236-900-01 Rev. E
Date:
March 2001
Quality:
Electronic document, no scan, very well readable.
Upload date:
July 23, 2020
MD5:
7d10a7a9-5ef6-2dda-88a3-05cd52232851
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Information
SECTION 1 — Getting Started
1.1 INTRODUCTION ...1-1
Source-Measure Concepts
1.2 OPERATION OVERVIEW...1-3
1.3 BASIC CIRCUIT CONFIGURATIONS...1-7
1.4 GUARD AND REMOTE SENSING ...1-9
1.5 OPERATING BOUNDARIES ...1-9
Front and Rear Panel Familiarization
1.6 FRONT PANEL FAMILIARIZATION ...1-13
1.7 REAR PANEL FAMILIARIZATION...1-16
Basic Source-Measure Techniques
1.8 POWER UP...1-19
1.9 CONNECTIONS...I'20
1.9.1 Source Measure Unit Connections to Test Fixture ...1-20
1.9.2 Test Connections ...1-21
1.10 SOURCE-MEASURE EXAMPLES ...1-22
1.10.1 Dc Operation Example — Resistor Test...1-22
1.10.2 Sweep Operation Example — Zener Diode Test... 1-24
SECTION 2 — Operation
2.1 INTRODUCTION...2-1
2.2 POWER UP PROCEDURE...2-3
2.2.1 Line Voltage Setting...2-3
2.2.2 Fuse Replacement ...2-3
2.2.3 Power Cord...2-4
2.2.4 Power up Display Messages and Self Test...2-4
2.2.5 Power up Configuration...2-4
2.2.6 Line Frequency Setting...2-4
2.2.7 Warm Up Period ...2-5
2.2.8 Fan Filter Cleaning ...2-5
Connections
2.3 BASIC TEST CONNECTIONS ...2-7
2.3.1 Interlock ...2-7
2.3.2 Guarding, Shielding and Sensing ...2-8
2.3.3 Model 8006 Component Test Fixture ...2-10
2.3.4 Custom Test Fixture...2-12
2.4 MULTI UNIT CONNECTIONS...2-16
2.4.1 Interlock Connections...2-16
2.4.2 Trigger Connections ...2-17
2.4.3 Test Connections ...2-19
2.5 IEEE-488 BUS CONNECTIONS ...2-20
2.5.1 Bus Connector ...2"20
2.5.2 Multiple Connections ...2-20
2.5.3 Recommended Cables...2-20
2.5.4 Connection Procedure ... 2-20
2.5.5 Bus Limitations ... 2-20
2.6 TYPICAL SWITCHING CONFIGURATIONS ... 2-21
2.6.1 Model 7058 Low Current Switching Card... 2-21
2.6.2 Model 7152 Low Current Matrix Card... 2-24
2.6.3 Model 7072 Semiconductor Matrix Card... 2-28
2.6.4 General Purpose Matrix Cards ... 2-30
2.7 HIGH VOLTAGE SWITCHING CONFIGURATIONS ... 2-31
2.7.1 Model 7154 2-pole High Voltage Scanner Card ... 2-31
2.7.2 Model 7054 1-pole High Voltage Scanner Card ... 2-32
2.7.3 Model 7070-PCA Prototype Circuit Assembly ... 2-32
2.7.4 Model 7072 HV High Voltage Semiconductor Matrix Card... 2-32
Operating Fundamentals (Dc Operation)
2.8 DISPLAY MESSAGES... 2-33
2.9 DATA ENTRY ... 2-33
2.9.1 Entering Source and Compliance Values... 2-35
2.9.2 Entering Other Operating Parameters... 2-36
2.10 MENU... 2-36
2.10.1 Dc Delay... 2-37
2.10.2 Default Delay... 2-37
2.10.3 Sense ... 2-39
2.10.4 Ac Line Frequency... 2-40
2.10.5 IEEE-488 Bus Address... 2-41
2.10.6 Display Test ... 2-41
2.10.7 Memory Test... 2-41
2.10.8 Factory Initialization... 2-42
2.11 SELECT SOURCE AND FUNCTION ... 2-44
2.12 SET COMPLIANCE AND MEASUREMENT RANGE... 2-46
2.13 AUTORANGE... 2-48
2.14 OPERATE... 2-49
2.15 /TIME... 2-50
2.16 Filter 2-52
2.17 SUPPRESS ... 2-53
Sweep Operation
2.18 BASIC SWEEP WAVEFORMS... 2-55
2.19 CREATE SWEEP... 2-61
2.19.1 Parameter Definitions... 2-61
2.19.2 General Procedure... 2-62
2.19.3 IEEE-488 Bus Operation... 2-67
2.19.4 Fixed Level Sweep... 2-67
2.19.5 Linear Staircase Sweep... 2-68
2.19.6 Logarithmic Staircase Sweep... 2-70
2.19.7 Pulse Sweep... 2-71
2.19.8 Linear Staircase Pulse Sweep... 2-72
2.19.9 Log Staircase Pulse Sweep... 2-73
2.20 APPEND SWEEP ... 2-75
2.20.1 Sweep Append Procedure... 2-76
2.20.2 IEEE-488 Bus Operation... 2-77
2.21 MODIFY SWEEP... 2-78
2.21.1 Sweep Modification Procedure... 2-80
2.21.2 IEEE-488 Operation... 2-80
2.22 CONFIGURE TRIGGERS... 2-81
2.22.1 Input Triggers... 2-83
2.22.2 Input Trigger Origin ...
2.22.3 Output Triggers ... 2-88
2.22.4 Sweep End Output Trigger... 2-88
2.22.5 Enable/Disable Triggers... 2-88
2.22.6 Trigger Configuration Procedure ... 2-90
2.22.7 IEEE-488 Operation... 2-91
2.23 PERFORMING A SWEEP... 2-91
2.24 RECALLING SWEEP DATA... 2-92
2.25 MULTI UNIT OPERATION... 2-94
Source-Measure Considerations
2.26 CURRENT CLAMP... 2-99
2.27 SINK OPERATION... 2-101
2.28 MAKING STABLE MEASUREMENTS ... 2-105
2.29 MEASURE ONLY ... 2-110
2.30 GUARDING... 2-112
2.31 ELECTROSTATIC INTERFERENCE ... 2-113
2.32 THERMAL EMFS ... 2'113
2.33 ELECTROMAGNETIC INTERFERENCE (EMI) ... 2-114
2.34 GROUND LOOPS... 2‘114
SECTION 3 — IEEE-488 Reference
3.1 INTRODUCTION... 3-1
3.2 PRIMARY ADDRESS PROGRAMMING... 3-1
3.3 CONTROLLER PROGRAMMING... 3-2
3.4 FRONT PANEL ASPECTS OF IEEE-488 OPERATION... 3-2
3.4.1 Front Panel Messages ... 3-2
3.4.2 IEEE-488 Status Indicators... 3-5
3.4.3 LOCAL Key ... 3-5
3.5 GENERAL BUS COMMANDS... 3-5
3.5.1 REN (Remote Enable)... 3-6
3.5.2 IFC (Interface Clear) ... 3-6
3.5.3 LLO (Local Lockout)... 3-6
3.5.4 GTL (Go To Local) and Local... 3-6
3.5.5 DCL (Device Clear) ... 3-7
3.5.6 SDC (Selective Device Clear)... 3-7
3.5.7 GET (Group Execute Trigger)... 3-7
3.5.8 SPE, SPD (Serial Polling)... 3-7
Device-dependent Commands
3.6 DEVICE-DEPENDENT COMMAND PROGRAMMING... 3-11
3.6.1 A — Modify Sweep List ... 3-16
3.6.2 B —Bias... 349
3.6.3 C — Calibration... 3-22
3.6.4 D —Display... 3'25
3.6.5 F — Source and Function... 3-27
3.6.6 G — Output Data Format... 3-28
3.6.7 H — IEEE Immediate Trigger ... 3-35
3.6.8 J — Self-tests... 3-36
3.6.9 K —EOI and Bus Hold-Off ... 3-37
3.6.10 L — Compliance... 3"3
3.6.11 M — SRQ Mask and Serial Poll Byte Format... 3'40
3.6.12 N — Operate... 3'44
3.6.13 O — Output Sense... 3'4
3.6.14 P — Filter 3-46
3.6.15 Q — Create/Append Sweep List ...3-47
3.6.16 R — Trigger Control ...3-57
3.6.17 S — Integration Time ...3-58
3.6.18 T — Trigger Configuration...3-59
3.6.19 U — Status ...3-62
3.6.20 V — 1100V Range Control ...3-75
3.6.21 W — Default Delay...3-77
3.6.22 X — Execute...3-79
3.6.23 Y —Terminator...3-80
3.6.24 Z — Suppress...3-81
3.7 TIMING CONSIDERATIONS...3-82
3.7.1 Factors Affecting Sweep Times...3-83
3.7.2 Optimizing Source and Measurement Speed ...3-83
3.7.3 Estimating Sweep Performance...3-91
3.7.4 Estimating dc Performance ...3-92
APPENDICES
A Device-dependent Command Summary...A-l
B Interface Function Codes...B-l
C ASCII Character Codes and IEEE-488 Multiline Interface Command Messages ...C-l
D Controller Programs...D-l
E IEEE-488 Bus Overview...E-l
F 236/237 Performance Verification ...F'l